New Research


Functional oxide thin films

−sensor, memory and LSI−

Professor M. Okuyama, Associate Professor T. Kanashima, Assistant Professor M. Sohgawa, D. Ricinschi

Recently, many semiconductor devices are usually used in our circumference. For example, a light is automatically turned on when you enter a room, because the sensor which can detect the human is put at the entrance. However, sensors commonly used can detect the motion of something, cannot distinguish objects such as human, animal, etc. We have developed the image sensor chip which has many sensing elements fabricated by using micro-machining technique, and this chip can distinguish a shape. This corresponds to \"eye\" for robots.
A robot is not only used for industrial purpose, but for human-support area, and a robot is operated near human body. Human support robot must have sensitive tactile. Because a robot must continuously detect the pressure and must be controlled to use it safely for human-supporting. We have developed the micro tactile sensor fabricated by micro-machining technique on one chip. This sensor can detect normal and shear stresses, and can distinguish a shape. This corresponds to \"skin\" for robots, and can directly touch human body.
Moreover, we study on LSI and memories which correspond to \"brain\" for robots. We have developed a new fabrication technique, and unique non-volatile memories.
Now, oxide thin film is very important for these sensors and semiconductor devices, because the performance is directly affected by the properties of oxide films. So, it is required to prepare a good oxide film and research unique materials. We are now conducting advanced research on preparation of good bismuth ferrite oxide which shows multiferroic property.
The overview of our research is described by using an example of robot. We research the wide area such as sensors, LSI, memories, from basics to applications.

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